INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "PURIFICATION OF METAL HALIDE PRECURSORS"

GENEVA, May 6 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2024/052435) for "PURIFICATION OF METAL HALIDE PRECURSORS" on Oct 22, 2024. With publication no. WO/2025/090523, the details related to the patent application was published on May 01, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BALASANTHIRAN, Vagulejan (129 Concord Rd.Billerica, Massachusetts 01821), LANEMAN, Scott A. (129 Concord Rd.Billerica, Massachusetts 01821), ALSHAKOVA, Iryna (129 Concord Rd.Billerica, Massachusetts 01821), PATNAIK, Smita (129 Concord Rd.Billerica, Ma...