INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "PRECURSORS FOR SELECTIVE DEPOSITION OF SILICON-CONTAINING FILMS"

GENEVA, March 10 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2024/043016) for "PRECURSORS FOR SELECTIVE DEPOSITION OF SILICON-CONTAINING FILMS" on Aug 20, 2024. With publication no. WO/2025/049165, the details related to the patent application was published on Mar 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HOOD, Drew Michael (129 Concord Rd.Billerica, Massachusetts 01821), CAMERON, Thomas M. (129 Concord Rd.Billerica, Massachusetts 01821), HENDRIX, Bryan C. (129 Concord Rd.Billerica, Massachusetts 01821)

Abstract: Precursor...