GENEVA, Oct. 20 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/023757) for "METAL-CONTAINING PRECURSORS" on Apr 08, 2025. With publication no. WO/2025/217227, the details related to the patent application was published on Oct 16, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HOOD, Drew Michael (129 Concord RoadBillerica, Massachusetts 01821)
Abstract: Methods for forming a vapor deposition precursor are provided. The method comprises contacting a metal halide compound, a Grignard reagent, and a carbodiimide compound to form the va...