INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "LASER ABLATION APPLICATIONS FOR ELECTROSTATIC CHUCKS"

GENEVA, May 19 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2024/049138) for "LASER ABLATION APPLICATIONS FOR ELECTROSTATIC CHUCKS" on Sep 27, 2024. With publication no. WO/2025/101286, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YENER, Doruk (129 Concord RoadBillerica, Massachusetts 01821), RYBCZYNSKI, Jakub (129 Concord RoadBillerica, Massachusetts 01821), PARKER, Isaac J. (129 Concord RoadBillerica, Massachusetts 01821), GUNDA, Nilesh (129 Concord RoadBilleric...