GENEVA, Feb. 18 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2024/040983) for "ION IMPLANTATION METHOD AND RELATED SYSTEMS" on Aug 05, 2024. With publication no. WO/2025/034675, the details related to the patent application was published on Feb 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LAWRENCE, Kaitlin J. (129 Concord RoadBillerica, Massachusetts 01821)
Abstract:
An ion implantation method and related systems are provided herein. The method of ion implantation comprises vaporizing a precursor comprising a metal borohydride...