GENEVA, Oct. 6 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/021205) for "HIGH RATE BULK OXIDE CMP COMPOSITION" on Mar 24, 2025. With publication no. WO/2025/207546, the details related to the patent application was published on Oct 02, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HAINS, Alexander W. (129 Concord RoadBillerica, Massachusetts 01821), ZHAO, Qiang (129 Concord RoadBillerica, Massachusetts 01821), CHANG, Juyeon (129 Concord RoadBillerica, Massachusetts 01821), ROBELLO, Douglas (129 Concord RoadBillerica, Massachusett...