INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "HIGH CLAMP FORCE ELECTROSTATIC CHUCK FOR NON-FLAT SUBSTRATES"

GENEVA, June 18 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2024/058110) for "HIGH CLAMP FORCE ELECTROSTATIC CHUCK FOR NON-FLAT SUBSTRATES" on Dec 02, 2024. With publication no. WO/2025/122433, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DONNELL, Steven (129 Concord Rd.Billerica, Massachusetts 01821), PARKER, Isaac J. (129 Concord Rd.Billerica, Massachusetts 01821), MINSKY, Caleb (129 Concord Rd.Billerica, Massachusetts 01821), RYBCZYNSKI, Jakub (129 Concord Rd....