GENEVA, Jan. 27 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/037782) for "ELECTROSTATIC CHUCK WITH PROTECTIVE COATING" on Jul 15, 2025. With publication no. WO/2026/019849, the details related to the patent application was published on Jan 22, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WALDFRIED, Carlo (129 Concord RoadBillerica, Massachusetts 01821), HOU, Jianan (129 Concord RoadBillerica, Massachusetts 01821), RYBCZYNSKI, Jakub (129 Concord RoadBillerica, Massachusetts 01821)
Abstract: Electrostatic chucks, as described her...