INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "COMPOSITIONS FOR POST-CMP CLEANING OF MICROELECTRONIC DEVICES"

GENEVA, Jan. 20 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/036728) for "COMPOSITIONS FOR POST-CMP CLEANING OF MICROELECTRONIC DEVICES" on Jul 08, 2025. With publication no. WO/2026/015488, the details related to the patent application was published on Jan 15, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WHITE, Michael L. (129 Concord RoadBillerica, Massachusetts 01821), LIU, Jun (129 Concord Rd.Billerica, Massachusetts 01821), DAS, Atanu K. (129 Concord Rd.Billerica, Massachusetts 01821), KUTTIATOOR, Sudeep Pallikkara (129 Con...