GENEVA, Sept. 10 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/017640) for "COMPOSITION FOR POST-CMP CLEANING" on Feb 27, 2025. With publication no. WO/2025/184374, the details related to the patent application was published on Sep 04, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LIU, Jun (129 Concord Rd.Billerica, Massachusetts 01821), WHITE, Michael (129 Concord RoadBillerica, Massachusetts 01821), WHITE, Daniela (129 Concord RoadBillerica, Massachusetts 01821)
Abstract:
The invention provides a composition comprising water,...