INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "CMP COMPOSITION INCLUDING AMINOSILANE MODIFIED SILICA COATED CERIA PARTICLES"

GENEVA, Jan. 20 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/037288) for "CMP COMPOSITION INCLUDING AMINOSILANE MODIFIED SILICA COATED CERIA PARTICLES" on Jul 11, 2025. With publication no. WO/2026/015805, the details related to the patent application was published on Jan 15, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WARD, William J. (129 Concord Rd.Billerica, Massachusetts 01821), KRAFT, Steven (129 Concord Rd.Billerica, Massachusetts 01821), GRUMBINE, Steven (129 Concord Rd.Billerica, Massachusetts 01821), ZHAO, Qiang (129 ...