INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "AREA SELECTIVE DEPOSITION OF ALUMINUM BASED FILMS USING ALKYL ALUMINUM AMIDINATE PRECURSORS"

GENEVA, Aug. 26 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/014399) for "AREA SELECTIVE DEPOSITION OF ALUMINUM BASED FILMS USING ALKYL ALUMINUM AMIDINATE PRECURSORS" on Feb 04, 2025. With publication no. WO/2025/174626, the details related to the patent application was published on Aug 21, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HOOD, Drew Michael (129 Concord Rd.Billerica, Massachusetts 01821)

Abstract: Area selective deposition of aluminum-based films using alkyl aluminum amidinate precursors and methods thereof are p...