GENEVA, March 24 -- EDWARDS LIMITED (Innovation DriveBurgess Hill Sussex RH15 9TW) filed a patent application (PCT/GB2024/051853) for "VACUUM PUMPING SYSTEM AND METHOD" on Jul 16, 2024. With publication no. WO/2025/056867, the details related to the patent application was published on Mar 20, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MANN, Andrew David (Edwards LimitedInnovation DriveBurgess Hill Sussex RH15 9TW), ODLUM, Mark Richard Bilbie (Edwards LimitedInnovation DriveBurgess Hill Sussex RH15 9TW)
Abstract:
A vacuum pump system and method for evacuating a process chamber compris...