GENEVA, March 24 -- EDWARDS LIMITED (Innovation DriveBurgess Hill Sussex RH15 9TW) filed a patent application (PCT/GB2024/051855) for "VACUUM PUMPING SYSTEM AND METHOD" on Jul 16, 2024. With publication no. WO/2025/056868, the details related to the patent application was published on Mar 20, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): NORTH, Phillip (Edwards LimitedInnovation DriveBurgess Hill Sussex RH15 9TW)
Abstract:
A vacuum pumping system and method for evacuating a vacuum system. The vacuum system may be a wafer transfer station and comprises a smaller load lock vacuum chamber ...