INTERNATIONAL PATENT: EDWARDS LIMITED FILES APPLICATION FOR "A VALVE MODULE FOR A VACUUM PUMPING AND/OR ABATEMENT APPARATUS"

GENEVA, Oct. 19 -- EDWARDS LIMITED (Edwards LimitedInnovation DriveBurgess Hill Sussex RH15 9TW) filed a patent application (PCT/GB2025/050729) for "A VALVE MODULE FOR A VACUUM PUMPING AND/OR ABATEMENT APPARATUS" on Apr 07, 2025. With publication no. WO/2025/215344, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DEO, Hammond (Edwards LimitedInnovation DriveBurgess Hill Sussex RH15 9TW)

Abstract: A vacuum pumping or abatement system (400) for respectively evacuating or abating process gas from a process chamber, the syst...