GENEVA, Aug. 18 -- EBARA CORPORATION (11-1, Haneda Asahi-cho, Ota-ku, Tokyo1448510), 株式会社荏原製作所 (東京都大田区羽田旭町１１番１号) filed a patent application (PCT/JP2025/003516) for "SUBSTRATE SUCTION MEMBER, TOP RING, SUBSTRATE PROCESSING DEVICE, AND METHOD FOR MANUFACTURING SUBSTRATE SUCTION MEMBER" on Feb 04, 2025. With publication no. WO/2025/169903, the details related to the patent application was published on Aug 14, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organiz...