INTERNATIONAL PATENT: EBARA CORPORATION, 株式会社荏原製作所 FILES APPLICATION FOR "SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING PROGRAM AND SUBSTRATE PROCESSING DEVICE"

GENEVA, Nov. 18 -- EBARA CORPORATION (11-1, Haneda Asahi-cho, Ota-ku, Tokyo1448510), 株式会社荏原製作所 (東京都大田区羽田旭町１１番１号) filed a patent application (PCT/JP2025/016989) for "SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING PROGRAM, AND SUBSTRATE PROCESSING DEVICE" on May 09, 2025. With publication no. WO/2025/234474, the details related to the patent application was published on Nov 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization...