INTERNATIONAL PATENT: CYMER, LLC FILES APPLICATION FOR "SYSTEMS AND METHODS FOR ELECTRODE POSITION SENSING AND ADJUSTMENT"

GENEVA, Oct. 4 -- CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/IB2025/052440) for "SYSTEMS AND METHODS FOR ELECTRODE POSITION SENSING AND ADJUSTMENT" on Mar 06, 2025. With publication no. WO/2025/202806, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DUFFEY, Thomas, Patrick (17075 Thornmint CourtSan Diego, California 92127), WANG, Zhou (17075 Thornmint CourtSan Diego, California 92127)

Abstract: A light source includes a chamber configured to house a gas discharge medium,...