INTERNATIONAL PATENT: CYMER, LLC FILES APPLICATION FOR "PRE-IONIZATION TUBE FOR ACOUSTICS MITIGATION IN LIGHT SOURCE"

GENEVA, July 8 -- CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/IB2024/061126) for "PRE-IONIZATION TUBE FOR ACOUSTICS MITIGATION IN LIGHT SOURCE" on Nov 08, 2024. With publication no. WO/2025/141345, the details related to the patent application was published on Jul 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): DOU, Yong (17075 Thornmint CourtSan Diego, California 92127), WANG, Zhou (17075 Thornmint CourtSan Diego, California 92127)

Abstract: A lithography system includes a light source. The light source generates radiation in a chambe...