INTERNATIONAL PATENT: CYMER, LLC FILES APPLICATION FOR "LASER CHAMBER GAS FLOW AND ACOUSTIC CONTROL"

GENEVA, July 2 -- CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/IB2024/062218) for "LASER CHAMBER GAS FLOW AND ACOUSTIC CONTROL" on Dec 04, 2024. With publication no. WO/2025/133792, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ROKITSKI, Rostislav (17075 Thornmint CourtSan Diego, California 92127), WANG, Zhou (17075 Thornmint CourtSan Diego, California 92127), KOEHLER, Joseph, Henry, S. (17075 Thornmint CourtSan Diego, California 92127)

Abstract: In an apparatus for ge...