INTERNATIONAL PATENT: CYMER, LLC FILES APPLICATION FOR "ELECTRODES IN DISCHARGE CHAMBER FOR RADIATION SOURCE"

GENEVA, Nov. 17 -- CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/IB2025/053703) for "ELECTRODES IN DISCHARGE CHAMBER FOR RADIATION SOURCE" on Apr 08, 2025. With publication no. WO/2025/233713, the details related to the patent application was published on Nov 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LUO, Edward, Siqi (17075 Thornmint CourtSan Diego, California 92127)

Abstract: A discharge chamber comprises a housing, a first electrode, and a second electrode. The first electrode is positioned in the housing. The second electrode is ...