INTERNATIONAL PATENT: CYMER, LLC FILES APPLICATION FOR "CHAMBER EROSION BYPRODUCT FILTER"

GENEVA, July 8 -- CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/IB2024/062287) for "CHAMBER EROSION BYPRODUCT FILTER" on Dec 05, 2024. With publication no. WO/2025/141361, the details related to the patent application was published on Jul 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): UBNOSKE, Stephen, Michael (17075 Thornmint CtSan Diego, California 92127), SATIJA, Aman (17075 Thornmint CtSan Diego, California 92127), XIANG, Xun (17075 Thornmint CtSan Diego, California 92127)

Abstract: A lithographic apparatus includes a chamber that p...