INTERNATIONAL PATENT: CYMER, LLC FILES APPLICATION FOR "CAPACITOR SYSTEM FOR A RADIATION SOURCE OF A LITHOGRAPHIC APPARATUS"

GENEVA, July 29 -- CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/IB2024/062586) for "CAPACITOR SYSTEM FOR A RADIATION SOURCE OF A LITHOGRAPHIC APPARATUS" on Dec 12, 2024. With publication no. WO/2025/153874, the details related to the patent application was published on Jul 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): XIANG, Xun (17075 Thornmint CtSan Diego, California 92127), LUO, Edward, Siqi (17075 Thornmint CtSan Diego, California 92127)

Abstract: A lithographic apparatus includes a projection system and an illumination system tha...