GENEVA, Aug. 25 -- CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/IB2025/050408) for "CALIBRATION APPARATUS" on Jan 14, 2025. With publication no. WO/2025/172776, the details related to the patent application was published on Aug 21, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GOWAYED, Omar, Yasser (17075 Thornmint CourtSan Diego, California 92127), HUANG, Hao (17075 Thornmint CourtSan Diego, California 92127)
Abstract:
A calibration apparatus for a wavelength-tunable deep ultraviolet (DUV) light source includes a plasmonic device in a pa...