GENEVA, March 17 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/074518) for "VIBRATION-CORRECTION UNIT, METHOD FOR OPERATING A VIBRATION-CORRECTION UNIT, SENSOR AND LITHOGRAPHY APPARATUS HAVING A SENSOR" on Sep 03, 2024. With publication no. WO/2025/051703, the details related to the patent application was published on Mar 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MARANGONI, Rafael (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
The invention relates to a vibration-correction unit (100) for an object (101) in a lithography...