GENEVA, Feb. 16 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/070856) for "TILT MEASUREMENT IN PARTICLE MICROSCOPE SYSTEMS" on Jul 23, 2024. With publication no. WO/2025/031787, the details related to the patent application was published on Feb 13, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HUBER, Florian (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract:
Various examples of the disclosure relate to the measurement of the tilt and/or height of a sample to be examined in the case of particle microscope systems, especially electron b...