INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "TEMPERATURE-CONTROL DEVICE FOR CONTROLLING THE TEMPERATURE OF A POSITION-SENSITIVE COMPONENT OF A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM AND METHOD FOR PRODUCING A TEMPERATURE-CONTROL DEVICE"

GENEVA, Dec. 29 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/066437) for "TEMPERATURE-CONTROL DEVICE FOR CONTROLLING THE TEMPERATURE OF A POSITION-SENSITIVE COMPONENT OF A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM AND METHOD FOR PRODUCING A TEMPERATURE-CONTROL DEVICE" on Jun 12, 2025. With publication no. WO/2025/261893, the details related to the patent application was published on Dec 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KIRSCH, Valeri (Rudolf-Eber-Strasse 273447 Oberkochen), SCHULZE, Daniel (Rudolf-Eber-Strasse 273447 Ob...