GENEVA, March 24 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/071699) for "SUPPORT STRUCTURE FOR AN ILLUMINATION OPTICAL UNIT OF A PROJECTION EXPOSURE APPARATUS" on Jul 31, 2024. With publication no. WO/2025/056239, the details related to the patent application was published on Mar 20, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): LIEBAUG, Bjorn (Rudolf-Eber-Strasse 273447 Oberkochen), HAUF, Markus (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
A support structure (46) open on one side for an illumination optical unit (15) of a...