INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "STABILIZATION OF A REPAIRED REGION OF AN OBJECT FOR LITHOGRAPHY"

GENEVA, April 6 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2024/075251) for "STABILIZATION OF A REPAIRED REGION OF AN OBJECT FOR LITHOGRAPHY" on Sep 10, 2024. With publication no. WO/2025/067865, the details related to the patent application was published on Apr 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RHINOW, Daniel (Industriestr. 164380 Rossdorf), METTE, Gerson (Industriestr. 164380 Rossdorf), HERD, Benjamin (Industriestr. 164380 Rossdorf), AHMELS, Laura (Industriestr. 164380 Rossdorf), MARBACH, Hubertus (Industriestr. 164380 Ro...