INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "SIMULATION-BASED DEFECT AND REPAIR SHAPE DETERMINATION FOR AN OBJECT FOR LITHOGRAPHY"

GENEVA, Jan. 5 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2025/068044) for "SIMULATION-BASED DEFECT AND REPAIR SHAPE DETERMINATION FOR AN OBJECT FOR LITHOGRAPHY" on Jun 26, 2025. With publication no. WO/2026/003159, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GEORG, Niklas (Carl-Zeiss-Promenade 107745 Jena), VAN DRIEL, Martin (Carl-Zeiss-Promenade 107745 Jena), TABBONE, Gilles (Carl-Zeiss-Promenade 107745 Jena), BUDACH, Michael (Industriestr. 164380 RoBdorf), DR. RHIN...