INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "SECURING DEVICE FOR A LITHOGRAPHY SYSTEM AND LITHOGRAPHY SYSTEM COMPRISING SUCH A SECURING DEVICE"

GENEVA, Oct. 27 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/059670) for "SECURING DEVICE FOR A LITHOGRAPHY SYSTEM, AND LITHOGRAPHY SYSTEM COMPRISING SUCH A SECURING DEVICE" on Apr 09, 2025. With publication no. WO/2025/219167, the details related to the patent application was published on Oct 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KIRSCH, Valeri (Rudolf-Eber-Strasse 273447 Oberkochen), HAHNENKAMM, Anton (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: The invention relates to a securing device (100) for a lithography sy...