GENEVA, Sept. 8 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/083740) for "RESIDUAL GAS ANALYSIS METHOD AND RESIDUAL GAS ANALYSIS SYSTEM" on Nov 27, 2024. With publication no. WO/2025/180678, the details related to the patent application was published on Sep 04, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHILLING, Martin (c/o CARL ZEISS SMT GMBHRudolf-Eber-StraBe 273447 Oberkochen), ROOS, Matthias (c/o CARL ZEISS SMT GMBHRudolf-Eber-StraBe 273447 Oberkochen)
Abstract:
The invention relates to a residual gas analysis method and s...