GENEVA, Aug. 4 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/051550) for "PROJECTION OPTICAL UNIT, AND PROJECTION EXPOSURE SYSTEM" on Jan 22, 2025. With publication no. WO/2025/157853, the details related to the patent application was published on Jul 31, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WURMBRAND, Andreas (Rudolf-Eber-Strasse 273447 Oberkochen), ROSENBERGER, Markus (75, GraafEngelbertlaan4837 DS Breda), KULITZKI, Viktor (Rudolf-Eber-Strasse 273447 Oberkochen), JABORSKY, Roman (Rudolf-Eber-Strasse 273447 Oberkochen)
Abst...