GENEVA, April 6 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/075764) for "PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY COMPRISING A CONNECTING ELEMENT" on Sep 16, 2024. With publication no. WO/2025/067920, the details related to the patent application was published on Apr 03, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SPEIDEL, Timo (Rudolf-Eber-Strasse 273447 Oberkochen), KURTH, Carina (Rudolf-Eber-Strasse 273447 Oberkochen), KRUIS, Johannes (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
The invention relates ...