GENEVA, Aug. 24 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2025/053844) for "ORGANOHALOGEN PRECURSORS FOR PARTICLE BEAM-INDUCED MASK REPAIR" on Feb 13, 2025. With publication no. WO/2025/172428, the details related to the patent application was published on Aug 21, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): PREISCHL, Christian (Rudolf-Eber-Str. 273447 Oberkochen), RHINOW, Daniel (Industriestr. 164380 Rossdorf)
Abstract:
The present invention relates, inter alia, to a method of processing a lithography object comprising providing a fi...