GENEVA, Dec. 29 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/066200) for "OPTICAL SYSTEM AND PROJECTION EXPOSURE APPARATUS" on Jun 11, 2025. With publication no. WO/2025/261849, the details related to the patent application was published on Dec 26, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GLEASON GONZALEZ, Cristian (Rudolf-Eber-Strasse 273447 Oberkochen), KNORR, Soeren (Rudolf-Eber-Strasse 273447 Oberkochen), MA JUNYONG, Vincent (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: An optical system (100, 100A, 100B) for a projecti...