GENEVA, Nov. 10 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/061766) for "OPTICAL SYSTEM, LITHOGRAPHY INSTALLATION AND METHOD FOR PRODUCING AN OPTICAL SYSTEM" on Apr 29, 2025. With publication no. WO/2025/229021, the details related to the patent application was published on Nov 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HAENECKE, Matthias (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: The invention relates to an optical system (200, 300, 400, 500), comprising a component (202), a support structure (204) for supporting the...