GENEVA, May 12 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/080452) for "OPTICAL ROD FOR MIXING ILLUMINATION LIGHT IN AN ILLUMINATION OPTICAL UNIT OF A LITHOGRAPHIC PROJECTION EXPOSURE SYSTEM" on Oct 28, 2024. With publication no. WO/2025/093492, the details related to the patent application was published on May 08, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHWAB, Markus (Rudolf-Eber-Strasse 273447 Oberkochen), BIELING, Stig (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
An optical rod (19) is used to mix illumination ligh...