INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "OPTICAL COMPONENT, METHOD FOR INSTALLING THE OPTICAL COMPONENT, PROJECTION EXPOSURE APPARATUS"

GENEVA, Jan. 27 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/067604) for "OPTICAL COMPONENT, METHOD FOR INSTALLING THE OPTICAL COMPONENT, PROJECTION EXPOSURE APPARATUS" on Jun 24, 2024. With publication no. WO/2025/016668, the details related to the patent application was published on Jan 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BIEHLER, Jasmin (Rudolf-Eber-Strasse 273447 Oberkochen), SCHLATHAUER, Maria (Rudolf-Eber-Strasse 273447 Oberkochen), KOHL, Vincent (Rudolf-Eber-Strasse 273447 Oberkochen), HAUG, Joerg (Rudolf-Eber-St...