INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "OPTICAL ASSEMBLY FOR AN EUV PROJECTION EXPOSURE APPARATUS, EUV PROJECTION EXPOSURE APPARATUS"

GENEVA, Feb. 3 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/067962) for "OPTICAL ASSEMBLY FOR AN EUV PROJECTION EXPOSURE APPARATUS, EUV PROJECTION EXPOSURE APPARATUS" on Jun 26, 2024. With publication no. WO/2025/021415, the details related to the patent application was published on Jan 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): EHM, Dirk (Rudolf-Eber-Strasse 273447 Oberkochen), BECKER, Moritz (Rudolf-Eber-Strasse 273447 Oberkochen), WIDMANN, Daniel (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: Optical assembly (100, 20...