GENEVA, May 17 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/079809) for "MODULAR METROLOGY APPARATUS FOR INTERCHANGEABLE PROCESS MODULES" on Oct 22, 2024. With publication no. WO/2025/098761, the details related to the patent application was published on May 15, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HENGSBERGER, Patrick (Rudolf-Eber-Strasse 273447 Oberkochen), KORB, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
A modular metrology apparatus comprises a vacuum chamber housing with an opening having a mechanical in...