GENEVA, Dec. 8 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/058994) for "MICROLITHOGRAPHIC PROJECTION OBJECTIVE" on Apr 02, 2025. With publication no. WO/2025/247534, the details related to the patent application was published on Dec 04, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WABRA, Norbert (Rudolf-Eber-StraBe 273447 Oberkochen), SCHNEIDER, Sonja (Rudolf-Eber-StraBe 273447 Oberkochen), GRAF, Peter (Rudolf-Eber-StraBe 273447 Oberkochen), KIMLING, Johannes (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract: The invention relates to...