GENEVA, April 6 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/077179) for "MICRO-ELECTROMECHANICAL SYSTEM WITH FIXATION" on Sep 26, 2024. With publication no. WO/2025/068439, the details related to the patent application was published on Apr 03, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): STROBEL, Sebastian (Rudolf-Eber-StraBe 273447 Oberkochen), BROCH, Katharina (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract:
The invention relates to a micro-electromechanical system (100) comprising at least one element (101) which can be moved ...