GENEVA, Oct. 13 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/058580) for "METHOD OF WAVEFRONT CORRECTION IN A SEMICONDUCTOR TECHNOLOGY APPARATUS" on Mar 28, 2025. With publication no. WO/2025/209943, the details related to the patent application was published on Oct 09, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHUWALOW, Sergej (Rudolf-Eber-Strasse 273447 Oberkochen), HARMES, Robert (Rudolf-Eber-Strasse 273447 Oberkochen), VON HODENBERG, Martin (Rudolf-Eber-Strasse 273447 Oberkochen), BAER, Norman (Rudolf-Eber-Strasse 273447 Obe...