GENEVA, June 30 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/080563) for "METHOD FOR SMOOTHING A SURFACE OF A SUBSTRATE" on Oct 29, 2024. With publication no. WO/2025/131385, the details related to the patent application was published on Jun 26, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): RUCK, Joachim (Rudolf-Eber-Strasse 273447 Oberkochen), LEMONS, Manuel (Rudolf-Eber-Strasse 273447 Oberkochen), DIER, Oliver (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
The invention relates to a method for smoothing a surface (2) of a sub...