GENEVA, March 24 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2024/074949) for "METHOD FOR SECURING A MEMS MICROMIRROR UNIT AND MEMS MICROMIRROR UNIT" on Sep 06, 2024. With publication no. WO/2025/056427, the details related to the patent application was published on Mar 20, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HAUF, Markus (Rudolf-Eber-StraBe 273447 Oberkochen), BIEG, Hermann (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract:
The invention relates to a method for securing a MEMS micromirror unit (100) in an overarching assembly ...