GENEVA, Sept. 8 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/055113) for "METHOD FOR REGULATING THE TEMPERATURE OF AN OPTICAL MODULE FOR MICROLITHOGRAPHY" on Feb 26, 2025. With publication no. WO/2025/181116, the details related to the patent application was published on Sep 04, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BOHLEN, Markus (Rudolf-Eber-Str. 273447 Oberkochen), WISSEL, Kurt Stephan (Rudolf-Eber-Str. 273447 Oberkochen), HYBL, Ondrej (Rudolf-Eber-Str. 273447 Oberkochen), KANIUT, Alexander (Rudolf-Eber-Str. 273447 Oberkoch...