INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR REDUCING ACOUSTIC VIBRATIONS, CONNECTION ELEMENT AND PROJECTION EXPOSURE SYSTEM"

GENEVA, Sept. 16 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/055167) for "METHOD FOR REDUCING ACOUSTIC VIBRATIONS, CONNECTION ELEMENT, AND PROJECTION EXPOSURE SYSTEM" on Feb 26, 2025. With publication no. WO/2025/186073, the details related to the patent application was published on Sep 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KLASNA, Michael (Rudolf-Eber-Strasse 273447 Oberkochen), GNANDT, David-Guenther (Rudolf-Eber-Strasse 273447 Oberkochen), SPEIDEL, Timo (Rudolf-Eber-Strasse 273447 Oberkochen), STEININGER, Peter (Rudol...