INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR REDUCING A LONG-TERM CHANGE IN A FORM, OPTICAL ELEMENT AND SYSTEM FOR SEMICONDUCTOR TECHNOLOGY"

GENEVA, Feb. 2 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/067838) for "METHOD FOR REDUCING A LONG-TERM CHANGE IN A FORM, OPTICAL ELEMENT AND SYSTEM FOR SEMICONDUCTOR TECHNOLOGY" on Jun 25, 2025. With publication no. WO/2026/021775, the details related to the patent application was published on Jan 29, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FUCHS, Sebastian (Rudolf-Eber-Strasse 273447 Oberkochen), LEMONS, Manuel (Rudolf-Eber-Strasse 273447 Oberkochen), OBERMAIER, Stefan (Schaffhauserstrasse 5808052 Zurich), ZAHLTEN, Claus (Ru...