GENEVA, June 30 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/083537) for "METHOD FOR PROTECTING AN ADHESIVE LAYER FROM STRAY RADIATION, OPTICAL COMPONENT AND SEMICONDUCTOR TECHNOLOGY INSTALLATION" on Nov 26, 2024. With publication no. WO/2025/131579, the details related to the patent application was published on Jun 26, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MA JUNYONG, Vincent (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract:
The invention relates to a method for protecting an adhesive layer (20) on an optical component (1...